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Aerotech的 WaferMax T 轉(zhuǎn)臺是需要低高度封裝結(jié)構(gòu)提供高性能應(yīng)用的理想選擇。最初設(shè)計用于滿足精密晶片檢測的需求，WaferMax T已經(jīng)被應(yīng)用到多種應(yīng)用。需要有限旋轉(zhuǎn)時，標準25毫米孔徑允許真空線容易直通穿過。如果連續(xù)旋轉(zhuǎn)是必要的，可選的單或雙端口旋轉(zhuǎn)接頭可以合并。臺面包括一個標準的安裝模式，其允許晶片易于卡盤安裝。

WaferMax T Specifications

Model		WaferMax T
Travel		360 degrees, continuous
Tabletop Diameter		106.7 mm
Drive System		Direct-drive brushless servomotor
Maximum Bus Voltage		up to 340 VDC
Maximum Torque (Continuous)		5.99 N?m
Encoder		2048 lines/rev fundamental; 10000 lines/rev fundamental
Accuracy(1)	HALAR	±25 μrad (±5 arc sec)
Bidirectional Repeatability		±10 μrad (±2 arc sec)
Tilt Error Motion		97 μrad (20 arc sec)
Axial Error Motion		5 μm
Radial Error Motion		5 μm
Maximum Speed		400 rpm (unloaded)
Maximum Load(2)	Axial	40 kg
	Radial	20 kg
Inertia		0.008130 kg?m2
Mass		7.0 kg
Material		Aluminum
Finish		Black Anodize

1. Available with Aerotech controllers.
2. Maximum loads are mutually exclusive.
3. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

• Axial and Radial Cantilevered Load Capability (WaferMax T)

Dimensions

• WaferMax T

Ordering Information

Ordering Example

WaferMax T

-RE2048AS

-RU

Ordering Options

Series	Encoder	Options
WaferMax T	-RE2048AS -RE10000AS	-RU1 -RU2 -GRND

WaferMax T Direct-Drive Rotary Stage

Option	Description
WaferMax T	Direct-drive rotary stage with 25 mm clear aperture

Encoder

Option	Description
-RE2048AS	Rotary encoder 2048 lines/rev; fundamental AS output
-RE10000AS	Rotary encoder 10000 lines/rev; fundamental AS output

Options

Option	Description
-RU1	Rotary union for feed-through of air/vacuum, single port
-RU2	Rotary union for feed-through of air/vacuum, dual port
-GRND	Adds grounding connection from tabletop