Aerotech的 ABRT 系列空氣軸承精密直驅轉臺提供卓越的角度定位，速度穩(wěn)定性和無誤差運動性能，并且擁有令人印象深刻的有效負載能力及出色的軸向和徑向剛性。該ABRT精密轉臺是專為滿足DVD母盤，晶圓檢測，高精度測量應用，X射線衍射系統(tǒng)，光學檢測和制造，以及微型機電系統(tǒng)(MEMS)/納米器件制造的嚴格要求。
● 零齒槽效應電機提供優(yōu)秀的速度穩(wěn)定性
● 卓越的無誤差運動和擺動性能
● 直接耦合的高精確度旋轉編碼器
● 大口徑通孔
● 無機械接觸
The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant performance is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance. Furthermore, this stage family provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.
To maximize positioning performance, the ABRT series utilizes optimized versions of Aerotech S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque-ripple-free. This makes ABRT stages ideal for applications requiring smooth scan velocities at low or high speeds.
An optical encoder is standard with the ABRT. When coupled with Aerotech feedback multipliers and controls, resolutions of <0.03 arc second are achievable.
Custom Designs
Custom versions of the ABRT are available to satisfy rate table and high precision inertial guidance test-stand applications. Other features, such as slip rings and rotary unions, are available.
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.