ABRT-400空氣軸承精密直驅(qū)轉(zhuǎn)臺 | ABRT-400 Air-Bearing Direct-Drive Rotary Stage | ABRT-400精密氣浮直驅(qū)轉(zhuǎn)臺
ABRT-400 是 Aerotech 的 μARC 角度和旋轉(zhuǎn)裝置校準(zhǔn)系統(tǒng)的核心。ABRT-400 是一個大的具備納米級誤差運(yùn)動性能的旋轉(zhuǎn)空氣軸承主軸。這種高精度空氣軸承主軸是用鋼緊密配合μARC周圍的花崗巖結(jié)構(gòu)的CTE建造的?？諝廨S承配備有不影響旋轉(zhuǎn)的接頭和滑環(huán)以通過真空或空氣，并且實(shí)現(xiàn)電氣連接到被測裝置。
ABRT-400 可以用作高精度測量設(shè)備的標(biāo)準(zhǔn)角度標(biāo)定，X射線衍射，蛋白質(zhì)晶體或高精度加工應(yīng)用。
Rotary Air-Bearing Stage Comparison
| Model | ABRT-260 | ABRT-400 | μARC |
|---|---|---|---|
| Accuracy | 4 arc sec |
2 arc sec |
0.12 arc sec |
| Repeatability | <1 arc sec |
<1 arc sec |
0.08 arc sec |
|
Axial Error Motion (Synchronous) |
<100 nm |
<100 nm |
<50 nm |
| Radial Error Motion (Synchronous) | <150 nm |
<250 nm |
<75 nm |
| Tilt Error Motion (Synchronous) | <0.5 arc sec |
<0.5 arc sec |
<0.1 arc sec |
| Axial Error Motion (Asynchronous) | <20 nm |
<20 nm |
<10 nm |
| Radial Error Motion (Asynchronous) | <20 nm |
<20 nm |
<10 nm |
| Tilt Error Motion (Asynchronous) | 0.04 arc sec |
0.04 arc sec |
0.01 arc sec |
| Load Capacity Axial | 69 kg | 110 kg | 200 kg |
| Load Capacity Radial | 10 kg | 90 kg | 50 kg |
| Slip Ring | Optional | Optional | Optional |