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您的位置：首頁 > 產(chǎn)品 > 高精密定位平臺 > 精密直線定位平臺 > 精密機械軸承絲杠驅(qū)動直線平臺 > ATS100 機械軸承絲杠平臺
ATS100 機械軸承絲杠平臺 | ATS100 Mechanical-Bearing Ball-Screw Linear Stage | 滾珠絲杠直線定位平臺
The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

ATS100 Specifications

Model ATS100-050 ATS100-100 ATS100-150 ATS100-200
Travel 50 mm 100 mm 150 mm 200 mm
Drive System Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus Voltage Up to 160 VDC
Continuous Current Apk Up to 2.3 A
Arms Up to 1.6 A
Feedback Noncontact Rotary Encoder (1000 line)
Resolution 2 mm/rev lead 0.5 μm @ 4000 steps/rev Motor Resolution
Maximum Travel Speed(1) 100 mm/s
Maximum Load(2) Horizontal 25.0 kg
Vertical 10.0 kg
Side 10.0 kg
Accuracy HALAR(3) ±0.5 μm ±0.5 μm ±0.75 μm ±1.0 μm
Standard ±2.0 μm ±3.0μm ±5.0 μm ±6.0 μm
Repeatability (Bidirectional) HALAR(3) ±0.3 μm
Standard ±0.7 μm
Straightness and Flatness Differential HALSF 1.0 μm/25 mm
Standard 2.0 μm/25 mm
Maximum
Deviation 		HALSF ±0.5 μm ± 1.0 μm ±1.5 μm ±1.75 μm
Standard ±1.0 μm ±2.0 μm ±2.0 μm ±3.0 μm
Pitch and Yaw 5 arc sec 8 arc sec 10 arc sec 12 arc sec
Nominal Stage Weight Less Motor 1.6 kg 1.7 kg 1.8 kg 2.0 kg
With Motor 2.7 kg 2.8 kg 2.9 kg 3.1 kg
Construction Aluminum Body/Stage and Table; Clear Anodize Finish
  1. Excessive duty cycle may impact stage accuracy.
  2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
  3. Available with Aerotech controllers.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • ATS100 Cantilevered Load Graph

Dimensions

  • ATS100
  • HDZ1 Bracket
  • MP100 Mounting Plate

Ordering Information

Ordering Example

ATS100 -050 - -20P -M - -BMS - -2 -NC-9DU -C025

Ordering Options

Series Travel (mm) Stage Construction Options Drive Screw Tabletop Motor Foldback Options Motor Orientation Limits Coupling
ATS100 -050
-100
-150
-200 		/VAC3
/VAC6
/STEEL 		-20P -M
-U

-NM
-SM
-BMS
-BMS-BRK
-BMS-AS
-BMS-AS-BRK
-BM
-BM-BRK
-BM-AS
-BM-AS-BRK

-FB025
-FB025-BRK

-0
-2
-3
-4
-5
-8
-12

-NC-9DU
-NC-FLY
-NO-9DU
-NO-FLY 		-C025
-C0375
-NONE

ATS100 Series Linear Ball-Screw Stage-

Option Description
ATS100 The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for a broad array of industrial applications. ATS100 series stages employ a precision-ground ball screw, which is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.
ATS100-050 50 mm (2 in) travel stage with limits
ATS100-100 100 mm (4 in) travel stage with limits
ATS100-150 150 mm (6 in) travel stage with limits
ATS100-200 200 mm (8 in) travel stage with limits

Stage Construction (Optional)

Option Description
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr
/STEEL All steel construction

Drive Screw (Required)

Option Description
-20P 2 mm/rev precision-ground ball screw

Tabletop (Required)

Option Description
-M Tabletop with metric dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation
-U Tabletop with English dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation

Motor (Required)

Option Description
-NM No motor or encoder
-SM Stepping motor with connector and home marker pulse (50SMB2-HM/)
-BMS Brushless servo motor with 2500-line encoder. (BMS60-A-D25-E2500H)
-BMS-BRK Brushless servo motor with 2500-line encoder and motor-mounted brake
(BMS60-A-D25-E2500H-BK1)
-BMS-AS Brushless servo motor with 1000-line amplified sine encoder (BMS60-A-D25-E1000ASH)
-BMS-AS-BRK Brushless servo motor with 1000-line amplified sine encoder and motor-mounted brake
(BMS60-A-D25-E1000ASH-BK1)
-BM Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E2500H)
-BM-BRK Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake
(BM75-D25-E2500H-BK1)
-BM-AS Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E1000ASH)
-BM-AS-BRK Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake
(BM75-D25-E1000ASH-BK1)

Foldback Options (Optional)

Option Description
-FB025 Foldback kit for 1/4" diameter shaft NEMA 23 motor
-FB025-BRK Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor

Motor Orientation (Required)

Option Description
-0
 No motor
-2 Bottom cable exit (optional orientation)
-3 Left side cable exit (standard orientation)
-4 Top cable exit (optional orientation)
-5 Right side cable exit (optional orientation)
-8 Right side fold-back (requires "FB" option, standard orientation)
-12 Left side fold-back (requires "FB" option, optional orientation)

Limits (Required)

Option Description
-NC-9DU Normally closed end of travel limit switches; 9-pin D connector
-NC-FLY Normally closed end of travel limit switches; flying leads
-NO-9DU Normally open end of travel limit switches; 9-pin D connector
-NO-FLY Normally open end of travel limit switches; flying leads

Coupling (Required)

Option Description
-C025 0.25 in coupling
-C0375 0.375 in coupling (required for BMS100 / BM130 motor)
-NONE No motor coupling

Note: Coupling -NONE must be selected with all -FB options

Options

Option Description
-MP100U English base mounting plate
-MP100U/VAC VAC6 prepared English base mounting plate
-MP100M Metric base mounting plate
-MP100M/VAC VAC6 prepared metric base mounting plate

Accessories (to be ordered as separate line item)

Option Description
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal
HDZ1 English right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1U/VAC6 VAC6 prepared English right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1M Metric right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1M/VAC6 VAC6 prepared metric right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1L English right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1L/VAC6 VAC6 prepared English right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1LM Metric right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1LM/VAC6 VAC6 prepared metric right angle L-bracket (ATS100-150 thru ATS100-200)
HALAR High-accuracy system linear error correction for accuracy and repeatability
HALSF High-accuracy system improved straightness and flatness


*Please go HERE for complete information on XY, XZ and YZ assembly options.

*Please go HERE for complete information on motor orientation options.